mwwXaiv lus

Khoom

Tsev Khoom Polishing tshuab Paub meej
Sim Tsis Siv Neeg Tshuab

Sim Tsis Siv Neeg Tshuab

Qhov hloov tau cinp system no muab siab - precision, siab {{sided polishing rau parallel planarar thaj tsam txhua cov khoom siv tau tshaj.

Xa kev nug

Muaj nuj nqi

Daim ntawv thov

 

{-} Tsis siv neeg siv lub tshuab polishing,}-

Cov Txheej Txheem Kawm Ntawv Semiconductor: Si CMP, Oxide CMP (TPSG, Top, Thox), Hlau CMP (W, Dielectric Film (Dielectric Films, thiab STI

Cov ntaub ntawv tshwj xeeb: Silicon Carbide (Sic), Sapphire Wafers, German Wafers, Lithobate, thiab iav substrates

Qhov hloov tau cinp system no muab siab - precision, siab {{sided polishing rau parallel planarar thaj tsam txhua cov khoom siv tau tshaj.

 

Sim Tsis Siv Neeg Tshuab

 

SAP200-S

Tus Qauv Qauv

SAP200-S

polishing disk

Qhov dav

Φ5103mm (20 '')

Tus nab npawj

1

Txo Disc Ceev

0-200rpm

Polishing taub hau

Kev Ua Haujlwm Ua Haujlwm

4 '' / 6 '' / 8inch

Txoj kev ntsuas Pressurization

Airbag Yooj Yim Siab Tom Qab Siab Ua Haujlwm (3-Cheeb Tsam Siab)

hov ceev

0-200rpm

Tus nab npawj

1

Precision Index

Qhov qis kawg nkaus dhia

Tsawg dua los yog sib npaug rau 0.01 hli

Flatness ntawm cov phaj qis

Tsawg dua los yog sib npaug rau 0.008mm

Cov khoom siv loj (L * W * H)

2150mm * 1100mm * 2150 hli

Ntaus Cov Ntaus

2000kg

 

Cim npe nrov: ARI -}} Tsis Siv Neeg Tshuaj Kho Tshuab Polishing Tshuab Polishing Tshuab Polishing Tshuab Polishing Tshuab Polishing Tshuab Polishing Tshuab Polishing Tshuab Polishing Tshuab Polishing Tshuab Polishing Tshuab Polishing Tshuab Compinial Tshuab

Tug:

Tsis muaj

Koj Tseem Yuav Zoo Li

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